| 摘要 |
PROBLEM TO BE SOLVED: To provide a physical quantity sensor having high reliability.SOLUTION: A physical quantity sensor 100 includes a substrate 10, a movable body 20 having a movable electrode section 21, pivot sections 30, 32 connected to the movable body 20, and forming a pivot axis Q of the movable body 20, a fixation section 40 fixed to the substrate 10, and adapted to support the movable body 20 via the pivot sections 30, 32, and a fixed electrode section 5 disposed on the substrate 10 so as to be opposed to the movable electrode section 21, and the fixation section 40 is provided with opening sections 46 disposed on a line of the pivot axis Q. |
