Device for analysis of structure of CAD data and REM image, has signal processor producing REM image, and controller synchronizing design data with REM image by adjusting design data and/or REM image based on distortion amount data

摘要

The device has an electron scanning unit for scanning a surface of a sample with an electron beam and detecting secondary electrons emitted by the surface of the sample. A signal processor produces a REM image based on a relationship between an irradiation position and an amount of the secondary electrons. A memory stores distortion amount data and an order of magnitude of position displacement in a scanning direction of the electron beam. A controller synchronizes design data (31) with the REM image by adjusting the design data and/or the REM image based on the distortion amount data. The design data are CAD data. An independent claim is also included for a structure analysis method.