| 摘要 |
PROBLEM TO BE SOLVED: To provide a controller capable of highly accurately controlling the drive of an actuator.SOLUTION: On the basis of a command to control an actuator for driving an object (table) to be driven and detection information of an encoder for detecting a drive state of the actuator (servo motor), the controller controls the actuator. On the basis of control information, frequency of disturbance to be received by the object to be driven is estimated at a disturbance frequency estimation part 10a, and on the basis of the estimated frequency, a disturbance estimator 10 predicts the disturbance after that and generates a predicted disturbance signal. On the basis of the predicted disturbance signal, a disturbance correction signal generation part 10c generates a disturbance correction signal O2 for requesting the actuator to generate disturbance suppression force which offsets force received by the object to be driven due to the disturbance. The actuator is controlled on the basis of the detection information and the disturbance correction signal O2. |
