发明名称 PATTERN TRANSFER PRINTING BY KINETIC CONTROL OF ADHESION TO ELASTOMERIC STAMP
摘要 PROBLEM TO BE SOLVED: To provide methods, systems and system components for transferring, assembling and integrating features and arrays of features having selected nanosized and/or microsized physical dimensions, shapes and spatial orientations.SOLUTION: Methods of the present invention utilize principles of 'soft adhesion' to guide transfer, assembly and/or integration of features, such as printable semiconductor elements or other components of electronic devices. The methods are useful for transferring features from a donor substrate to a transfer surface of an elastomeric transfer device and, optionally, from the transfer surface of the elastomeric transfer device to a receiving surface of a receiving substrate. The methods provide highly efficient, registered transfer of features and arrays of features, such as printable semiconductor elements, in a concerted manner that maintains relative spatial orientations of transferred features.
申请公布号 JP2013183163(A) 申请公布日期 2013.09.12
申请号 JP20130095896 申请日期 2013.04.30
申请人 BOARD OF TRUSTEES OF THE UNIV OF ILLINOIS 发明人 NUZZO RALPH G;ROGERS JOHN A;MENARD ETIENNE;LEE KEON J;KHANG DAHL-YOUNG;SUN YUGANG;MEITL MATTHEW;ZHU ZHENGTAO
分类号 H01L21/02;H01L27/12 主分类号 H01L21/02
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