| 摘要 |
PROBLEM TO BE SOLVED: To provide a beam monitoring system which is inexpensive and highly reliable by using a system for performing signal processing of only the number of wires corresponding to a range where beams are simultaneously irradiated and connecting the other wires to the number of wires corresponding to the irradiation range because the wires irradiated simultaneously with the beams are only a portion of all of the wires even though the number of wires per unit length of a multiwire type monitor for measuring a beam profile is in the direction of an increase, requiring thin shaped beams in order to perform accurate irradiation in a system for scanning beams of thin charged particles to perform irradiation.SOLUTION: In a multiwire type monitor for measuring a beam profile of charged particle beams, a beam monitoring system divides signals outputted from a plurality of wires, groups the same number of wires, extracts one signal from each group to connect signals, collects the number of signals being the number of wires belonging to the group and connects the signals to a signal processing part storing connection information. |
