发明名称 COMPOSITION FOR FORMING ALUMINUM BODY, AND METHOD FOR FORMING ALUMINUM BODY
摘要 PROBLEM TO BE SOLVED: To provide a composition for forming an aluminum body, which does not cause unevenness in a coating film and does not pollute a film deposition apparatus because only a small amount of an alane-amine complex volatilizes in an application step and a heating step.SOLUTION: A composition for forming an aluminum body contains a complex of a first amine compound and a hydrogenated aluminum, and an organic solvent. The vapor pressure of the complex is 5.0 Torr or less at 50°C, and the first amine compound is represented by general formula (1).
申请公布号 JP2013181224(A) 申请公布日期 2013.09.12
申请号 JP20120046393 申请日期 2012.03.02
申请人 JSR CORP 发明人 SAKAI TATSUYA;NISHIMURA HIDEKI;NAKAGAWA YASUSHI;YAMAMOTO MASAHIRO;AOKI HIDEYUKI;SAITO RYUICHI;FURUKAWA TAKESHI
分类号 C23C18/10;C07C211/65;C23C18/14;H01L21/28;H01L21/285;H01L21/3205;H01L21/768;H01L23/532 主分类号 C23C18/10
代理机构 代理人
主权项
地址