发明名称 |
COMPOSITION FOR FORMING ALUMINUM BODY, AND METHOD FOR FORMING ALUMINUM BODY |
摘要 |
PROBLEM TO BE SOLVED: To provide a composition for forming an aluminum body, which does not cause unevenness in a coating film and does not pollute a film deposition apparatus because only a small amount of an alane-amine complex volatilizes in an application step and a heating step.SOLUTION: A composition for forming an aluminum body contains a complex of a first amine compound and a hydrogenated aluminum, and an organic solvent. The vapor pressure of the complex is 5.0 Torr or less at 50°C, and the first amine compound is represented by general formula (1). |
申请公布号 |
JP2013181224(A) |
申请公布日期 |
2013.09.12 |
申请号 |
JP20120046393 |
申请日期 |
2012.03.02 |
申请人 |
JSR CORP |
发明人 |
SAKAI TATSUYA;NISHIMURA HIDEKI;NAKAGAWA YASUSHI;YAMAMOTO MASAHIRO;AOKI HIDEYUKI;SAITO RYUICHI;FURUKAWA TAKESHI |
分类号 |
C23C18/10;C07C211/65;C23C18/14;H01L21/28;H01L21/285;H01L21/3205;H01L21/768;H01L23/532 |
主分类号 |
C23C18/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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