LASER LIGHT SOURCE, LASER PROCESSING DEVICE, AND SEMICONDUCTOR PROCESSING METHOD

摘要

A laser light source (100) according to the present invention includes a laser resonator (150) including a fiber (107) containing a laser active medium and a fiber grating (105, 160) coupled to each of two ends of the fiber (107); an pumping laser light source (104) for emitting pump light into the laser resonator (150); a driving current supply circuit (102) for supplying a pulse-like driving current to the pumping laser light source (104); and a wavelength conversion element (101) for converting a wavelength of laser light which is output from the laser resonator. The laser resonator (150) generates laser light including a principal pulse and a plurality of superimposing pulses which are superimposed on the principal pulse, in accordance with incidence of the pump light; and converted light having the wavelength of each of the principal pulse and the superimposing pulses shortened is generated by the wavelength conversion element (101).