发明名称 |
DETECTION OF THIN LINES FOR SELECTIVE SENSITIVITY DURING RETICLE INSPECTION USING PROCESSED IMAGES |
摘要 |
A detection method for a spot image based thin line detection is disclosed. The method includes a step for generating a band limited spot image from a transmitted and reflected optical image of the mask. The spot image is calibrated to minimize a plurality of optical aberrations from the spot image. The spot image is restored back to a mask image to allow at least one of: a more reliable segmentation between thin line and non-thin line areas on the mask image or a more accurate line width measurement for facilitating segmentation. Thin line features and non-thin lines features are distinguished on the restored mask image. Areas containing thin line features are grown while preventing the thin line growth from encroaching the non-thin line features. |
申请公布号 |
WO2013134605(A1) |
申请公布日期 |
2013.09.12 |
申请号 |
WO2013US29790 |
申请日期 |
2013.03.08 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
WANG, ZHENGYU;SHI, RUI-FANG;YIN, LIH-HUAH;LI, BING |
分类号 |
G03F1/84 |
主分类号 |
G03F1/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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