发明名称 |
METHOD FOR REMOVING A HIGH DEFINITION NANOSTRUCTURE, A PARTLY FREESTANDING LAYER, A SENSOR COMPRISING SAID LAYER AND A METHOD USING SAID SENSOR |
摘要 |
The present invention is in the field of a method for removing a high definition nanostructure in a partly free-standing layer, the layer, a sensor comprising said layer, a use of said sensor, and a method of detecting a species, and optional further characteristics thereof, using said sensor. The sensor and method are suited for detecting single ions, molecules, low concentrations thereof, and identifying sequences of base pairs, e.g. in a DNA-strand. |
申请公布号 |
WO2013133700(A1) |
申请公布日期 |
2013.09.12 |
申请号 |
WO2013NL50136 |
申请日期 |
2013.03.04 |
申请人 |
TECHNISCHE UNIVERSITEIT DELFT |
发明人 |
XU, QIANG;SCHNEIDER, GREGORY;ZANDBERGEN, HENNY;WU, MENGYUE;SONG, BO |
分类号 |
G03F7/00;G01N33/487;G03F7/20;H01L29/16 |
主分类号 |
G03F7/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|