发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a high-gain semiconductor device by suppressing decrease in gain caused by increase in capacitor between a gate and a source by arranging a source field plate configured to suppress oscillation in the vicinity of the gate.SOLUTION: By arranging a shield plate electrode 30 short-circuited by a source terminal electrode S1 in the vicinity of a drain electrode 22, a region between a drain and a gate is electrically shielded, capacitor Cgd between the gate and the drain is reduced, and increase in capacitor Cgs between the gate and the source is suppressed. A source terminal electrode S1 including a via hole SC1 is arranged between an active region AA and a drain terminal electrode D1, and the shield plate electrode 30 is connected to the source terminal electrode S1.
申请公布号 JP2013183061(A) 申请公布日期 2013.09.12
申请号 JP20120046456 申请日期 2012.03.02
申请人 TOSHIBA CORP 发明人 YAMAMURA TAKUJI
分类号 H01L21/338;H01L21/336;H01L27/095;H01L29/06;H01L29/41;H01L29/778;H01L29/78;H01L29/812 主分类号 H01L21/338
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