| 摘要 |
A semiconductor device with buried word line structures and methods of forming the semiconductor device are provided. The semiconductor device includes a plurality of insulating line patterns extending in a direction in a substrate, a plurality of word lines alternately with ones of the plurality of insulating line patterns, the plurality of word lines extending in the direction and comprising a metal, a plurality of first doped regions on respective ones of the plurality of the word lines and between two adjacent ones of the plurality of insulating line patterns, an interlayer insulating film on the plurality of insulating line patterns and the plurality of first doped regions, the interlayer insulating film including a plurality of openings exposing upper surfaces of ones of the plurality of first doped regions and a plurality of second doped regions contacting respective ones of the plurality of first doped regions within the openings.
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