发明名称 Non-Uniform Alignment of Wafer Bumps with Substrate Solders
摘要 An integrated circuit structure includes a work piece selected from the group consisting of a semiconductor chip and a package substrate. The work piece includes a plurality of under bump metallurgies (UBMs) distributed on a major surface of the work piece; and a plurality of metal bumps, with each of the plurality of metal bumps directly over, and electrically connected to, one of the plurality of UBMs. The plurality of UBMs and the plurality of metal bumps are allocated with an overlay offset, with at least some of the plurality of UBMs being misaligned with the respective overlying ones of the plurality of metal bumps.
申请公布号 US2013236994(A1) 申请公布日期 2013.09.12
申请号 US201313886783 申请日期 2013.05.03
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 KUO HUNG-JUI;LIU CHUNG-SHI;YU CHEN-HUA
分类号 H01L21/66 主分类号 H01L21/66
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