Micropump, has housing with inlet region and outlet region, and electrical operated excitation element for creation of movement of movable membrane, and gas-permeable and liquid-impermeable fabric arranged over inlet region

摘要

The micropump has a housing including an inlet region (21), an outlet region (23), a cavity (32) with a movable membrane (33) and an electrically operated excitation element (1) for moving the movable membrane. A gas-permeable liquid-impermeable fabric (4) is arranged over the inlet region. The excitation element and the movable membrane are mechanically connected with the fabric. The fabric in the inlet region is arranged parallel to the movable membrane whose angle is smaller than maximum angle. An independent claim is also included for a method for operating a micropump.