| 摘要 |
PROBLEM TO BE SOLVED: To replenish a target without damaging a vacuum condition.SOLUTION: An ion generation vacuum container 110 is evacuated and a target 112 which is irradiated with laser light to generate ions is transported and disposed. A valve 130 is provided on a side face of the ion generation vacuum container 110, opened when transporting the target 112 into the ion generation vacuum container 110, and closed at any other time than the transportation. A target replenishment container 120 is mounted through the valve 130 to the ion generation vacuum container 110, holds the target 112 in a movable manner and can be evacuated independently of the ion generation vacuum container 110. The target 112 held in the target replenishment container 120 is transported to the ion generation vacuum container 110 in the state where the valve 130 is opened after the target replenishment container is evacuated in the state where the valve 130 is closed. |
