发明名称 FINE PITCH PROBE ARRAY FROM BULK MATERIAL
摘要 <p>Fine pitch probe array from bulk material. In accordance with a first method embodiment, an article of manufacture includes an array of probes. Each probe includes a probe tip, suitable for contacting an integrated circuit test point. Each probe tip is mounted on a probe finger structure. All of the probe finger structures of the array have the same material grain structure. The probe fingers may have a non-linear profile and/or be configured to act as a spring.</p>
申请公布号 WO2013134561(A1) 申请公布日期 2013.09.12
申请号 WO2013US29712 申请日期 2013.03.07
申请人 ADVANTEST CORPORATION;NAMBURI, LAKSHMIKANTH 发明人 NAMBURI, LAKSHMIKANTH
分类号 G01R1/067;H01L21/66 主分类号 G01R1/067
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