| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that a temperature control function of a heat block is confirmed in measurement of (1) temperature accuracy, (2) temperature heating/cooling velocity, (3) overshoot and (4) temperature uniformity, however, since specifications about temperature sensors to be required for the four kinds of above temperature control methods are different from one another, it is necessary to prepare different kinds of temperature probes since measurement of three different kinds of temperature specifications are independently performed.SOLUTION: In the present invention, a plurality of temperature sensors to be constituted of two kinds or one kind are held in a batch by a jig for measurement of four kinds of different temperature specifications including temperature accuracy, temperature heating/cooling velocity, overshoot, and temperature uniformity. In addition, the temperature accuracy which is originally ±2°C is raised to ±0.4°C by performing temperature matching calibration to a thermocouple with fast responsiveness. By application of a temperature control device, positioning by batching the temperature sensors becomes possible on a heat block by holding the plurality of temperature sensors in the batch. |
