发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a high-gain semiconductor device.SOLUTION: A metal ground surface is formed on the side of a substrate immediately below at least a partial region of a shield plate electrode, and the shield plate electrode short-circuited by a source electrode is arranged in the vicinity of a drain electrode. Thereby, an active layer between the gate and the drain is interposed by the ground surface from top and bottom. Thereby, a region between the drain and the gate is electrically shielded, capacitor Cgd between the gate and the drain is reduced, and increase in capacitor Cgs between the gate and the source is suppressed.
申请公布号 JP2013182993(A) 申请公布日期 2013.09.12
申请号 JP20120045372 申请日期 2012.03.01
申请人 TOSHIBA CORP 发明人 YAMAMURA TAKUJI
分类号 H01L21/338;H01L21/336;H01L27/095;H01L29/06;H01L29/41;H01L29/778;H01L29/78;H01L29/812 主分类号 H01L21/338
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