WASTE SOLUTION CONCENTRATION APPARATUS, WASTE SOLUTION CONCENTRATION METHOD, AND SUBSTRATE TREATMENT SYSTEM

摘要

PROBLEM TO BE SOLVED: To efficiently concentrate a waste solution while storing the succeeding waste solution.SOLUTION: A waste solution concentration apparatus 3 includes a plurality of waste solution pipings 10-12 for guiding a waste solution before concentration to first and second tanks 16 and 17, changeover devices 14 and 15 capable of opening and closing the plurality of the waste solution pipings 10-12 so as to selectively supply the waste solution before concentration to either one of the first and second tanks 16 and 17, and concentration apparatuses 22 and 23 for concentrating the waste solutions stored in the first and second tanks 16 and 17. This waste solution concentration apparatus 3 further includes a control apparatus 21 executing a storage process for alternately supplying the waste solution before concentration to the first tank 16 and the second tank 17 by controlling the changeover devices 14 and 15 and a concentration process for concentrating the waste solution in the tank not receiving the supply of the waste solution in parallel to the storage process by controlling the concentration apparatuses 22 and 23.