HIGH FREQUENCY POWER SOURCE DEVICE AND MATCHING METHOD THEREFOR

摘要

Provided is a high frequency power source device, and matching method therefor, in which the constant of a matching unit and the oscillating frequency of a frequency oscillator are variable, wherein the following are carried out simultaneously: frequency control in which a matching state value indicating the matching state between the high frequency power source and a load which is the destination of the supplied power is detected, and the oscillating frequency of the frequency oscillator is controlled on the basis of the matching state value; and matching unit control in which the constant of the matching unit is controlled on the basis of the matching state value. The oscillation frequency is continually updated by frequency control, even while the constant is being updated by matching unit control.