| 摘要 |
A system for transporting an article (18) between a plurality of processing devices (4) includes a track (10) extending above load ports (6) of the processing devices (4), and an overhead travelling vehicle (12) configured to travel along the track (10) and having a hoist (14). The system further includes a local track (20) disposed lower than the track (10), extending at least to a position under the track (10), and oriented perpendicular to the track (10) when viewed from above, a local carriage (22) configured to travel along the local track (20) and having a hoist (38) for vertically moving the article (18), and a buffer (26, 50, 60) disposed below the local track (20), configured to deliver and receive the article (18) to and from the local carriage (22), and extending at least to a position under the track (10). |
