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发明名称
USING METAL/METAL NITRIDE BILAYERS AS GATE ELECTRODES IN SELF-ALIGNED AGGRESSIVELY SCALED CMOS DEVICES
摘要
申请公布号
EP1872407(B1)
申请公布日期
2013.09.11
申请号
EP20060750529
申请日期
2006.04.18
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
CARTIER, EDUARD, A.;COPEL, MATTHEW, W.;DORIS, BRUCE, B.;JAMMY, RAJARAO;KIM, YOUNG-HEE;LINDER, BARRY, P.;NARAYANAN, VIJAY;PARUCHURI, VAMSI, K.;WONG, KEITH, KWONG, HON
分类号
H01L21/84;H01L21/8238;H01L27/092
主分类号
H01L21/84
代理机构
代理人
主权项
地址
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