THERMOCHEMICAL NANOLITHOGRAPHY COMPONENTS, SYSTEMS, AND METHODS
摘要
Improved nanolithography components, systems, and methods are described herein. The systems and methods generally employ a resistively heated atomic force microscope tip to thermally induce a chemical change in a surface. In addition, certain polymeric compositions are also disclosed.
申请公布号
EP2435880(A4)
申请公布日期
2013.09.11
申请号
EP20100781383
申请日期
2010.06.01
申请人
GEORGIA TECH RESEARCH CORPORATION
发明人
RIEDO, ELISA;MARDER, SETH R.;WANG, DEBIN;CURTIS, JENNIFER E.;SZOSZKIEWICZ, ROBERT J.;KODALI, VAMSI, K;OKADA, TAKASHI;JARVHOLM, ERIK JONAS;DE HEER, WALT A.;JONES, SIMON, C.;HUA, YUEMING;HENDERSON, CLIFFORD
