| 摘要 |
A film-forming composition is characterized by containing: a triazine ring-containing hyperbranched polymer containing a repeating unit structure represented by formula (1); and a dissolution-enhancing agent for breaking a hydrogen bond formed at least within the hyperbranched polymer and/or between molecules, between a nitrogen atom in the triazine ring, and a diarylamine-derived NH group. The film-forming composition has excellent dissolvability in organic solvents such as resist solvents, and has good handling and filtration properties at low viscosity.
(In the formula, R and R' each independently represent a hydrogen atom, an alkyl group, an alkoxy group, an aryl group, or an aralkyl group (however, at least one of R and R' represents a hydrogen atom); and Ar represents a divalent organic group containing an aromatic ring and/or a heterocyclic ring.) |
