发明名称 |
BAW GYROSCOPE WITH BOTTOM ELECTRODE |
摘要 |
<p>A bulk acoustic wave gyroscope has a primary member in a member plane, and an electrode layer in an electrode plane spaced from the member plane. The electrode layer has a first portion that is electrically isolated from a second portion. The first portion, however, is mechanically coupled with the second portion and faces the primary member (e.g., to actuate or sense movement of the primary member). For support, the second portion of the electrode is directly coupled with structure in the member plane.</p> |
申请公布号 |
EP2635873(A1) |
申请公布日期 |
2013.09.11 |
申请号 |
EP20110779955 |
申请日期 |
2011.11.02 |
申请人 |
ANALOG DEVICES, INC. |
发明人 |
SAMMOURA, FIRAS, N.;YANG, KUANG, L.;SAWYER, WILLIAM, D. |
分类号 |
G01C19/5698 |
主分类号 |
G01C19/5698 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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