摘要 |
<p>As a piezoelectric ceramic having an alkaline-containing niobic acid-perovskite structure which contains no lead and which has high piezoelectric properties, a piezoelectric ceramic which is dense and which has fine and homogeneous internal polycrystalline structure is provided without performing firing under a high pressure, firing in a specific atmosphere, and precise control of firing conditions, and in addition a manufacturing method of the piezoelectric ceramic and a piezoelectric device using the piezoelectric ceramic are also provided. The piezoelectric ceramic contains [K 1-x Na x ] 1-y Li y [Nb 1-z-w Ta z Sb w ]O 3 (x, y, z, and w each indicate a molar ratio, and 0‰¤x<1, 0‰¤y<1, 0‰¤z<1, and 0‰¤w<1 hold) as a primary phase and K 3 Nb 3 O 6 Si 2 O 7 as a subphase. In addition, the manufacturing method of the piezoelectric ceramic includes a step of obtaining a composition (or materials thereof) used as the primary phase, a step of obtaining a composition used as the subphase, a step of mixing the above two, and a step of molding and firing a mixture therebetween. Furthermore, in a piezoelectric device in which first electrodes and second electrodes face each other with piezoelectric ceramic layers interposed therebetween, the piezoelectric ceramic layers are each formed of the above piezoelectric ceramic.</p> |