| 摘要 |
PURPOSE: A cryopump and a regenerating method thereof are provided to remove the risk where a competent sensor becomes an ignition source of gas as the adsorbed gas is discharged from utmost low temperature surface by increasing temperatures and a pressure sensor is stopped. CONSTITUTION: A cryopump comprises a cryopanel, a cryopump container, a rough valve (72), a pressure sensor (94), and a control unit (100). The cryopanel is equipped with an adsorption area to adsorb a gas molecule. The cryopump container surrounds the cryopanel. The rough valve connects the cryopump container to a roughing pump. The pressure sensor measures inner pressure of the cryopump container. The control unit controls an outage period of the pressure sensor and the regeneration of the cryopanel. The control unit sets the outage period in an initial step of the regeneration and opens the rough valve for roughing the cryopump container in the outage period. |
