AREA CLASSIFYING DEVICE, SUBSTRATE DETECTING DEVICE AND METHOD FOR CLASSIFYING AREA

摘要

PURPOSE: A region classifying device, a substrate inspection device, and a region classifying method thereof are provided to improve inspection precision by accurately classifying an important area in the inspection of a circuit pattern. CONSTITUTION: A region extracting unit (12) extracts an attention region from a design image corresponding to a substrate based on the design data of a multilayer substrate. A net list generation unit (14) generates a first and a second net list based on the state of conductivity in the attention region. When the first net has a predetermined difference with the second net list, a region classifying unit (16) classifies the attention region as an important region. [Reference numerals] (12) Region extracting unit; (14) Net list generation unit; (16) Region classifying unit; (18) Classifying unit per each object; (26) Memory unit; (28) Operating unit; (34) Test data generating unit; (36) Camera unit; (38) Test unit; (500) Data server; (600) CAM editor; (800) Verify device; (PG1) Program