RESONANCE EDDY CURRENT METHOD FOR CONTROL OF PERFECTION OF STRUCTURE OF THIN NON-FERROMAGNETIC FILMS

摘要

A resonance eddy current method for control of perfection of structure of thin non-ferromagnetic films includes excitation of eddy currents in the object of control with alternating electromagnetic field. A sample of thin non-ferromagnetic films is placed to high-frequency field between flat coils of eddy current transducer (ECT) of screen type. For reveal of non-homogeneity of structure, the sample of thin non-ferromagnetic films is additionally placed between cylindrical coils of ECT, and the value of output signal amplitude from those coils is compared, at the same character of change of signals conclusion on perfection – structural integrity is made. At different character of change of amplitude of output signals – on imperfection – non uniformity of the structure.