发明名称 |
Method and apparatus for MEMS oscillator |
摘要 |
A resonator includes a CMOS substrate having a first electrode and a second electrode. The CMOS substrate is configured to provide one or more control signals to the first electrode. The resonator also includes a resonator structure including a silicon material layer. The resonator structure is coupled to the CMOS substrate and configured to resonate in response to the one or more control signals.
|
申请公布号 |
US8530258(B2) |
申请公布日期 |
2013.09.10 |
申请号 |
US201113275617 |
申请日期 |
2011.10.18 |
申请人 |
YANG XIAO;CHEN DONGMIN;WANG YE;PAYNE JUSTIN;WANG YUXIANG;JI WOOK;MIRADIA INC. |
发明人 |
YANG XIAO;CHEN DONGMIN;WANG YE;PAYNE JUSTIN;WANG YUXIANG;JI WOOK |
分类号 |
H01L21/00;H03B5/30 |
主分类号 |
H01L21/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|