Display device including an inverter circuit having a microcrystalline layer

摘要

A display device including an inverter circuit and a switch is provided. The inverter circuit includes a first thin film transistor and a second thin film transistor which have the same conductivity type. The first thin film transistor and the second thin film transistor each include: a gate insulating layer in contact with a gate electrode; a microcrystalline semiconductor layer in contact with the gate insulating layer; a mixed layer in contact with the microcrystalline semiconductor layer; a layer which includes an amorphous semiconductor and is in contact with the mixed layer; and a wiring. A conical or pyramidal microcrystalline semiconductor region and an amorphous semiconductor region filling a space except the conical or pyramidal microcrystalline semiconductor region are included in the mixed layer.