| 发明名称 |
EDDY CURRENT THICKNESS MEASUREMENT APPARATUS |
| 摘要 |
A sheet of a material is disposed in a melt of the material. The sheet is formed using a cooling plate in one instance. An exciting coil and sensing coil are positioned downstream of the cooling plate. The exciting coil and sensing coil use eddy currents to determine a thickness of the solid sheet on top of the melt. |
| 申请公布号 |
KR20130100289(A) |
申请公布日期 |
2013.09.10 |
| 申请号 |
KR20137006692 |
申请日期 |
2011.07.18 |
| 申请人 |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
ROSEN GARY J.;SINCLAIR FRANK;SOSKOV ALEXANDER;BUFF JAMES S. |
| 分类号 |
C30B11/00;C30B15/20;C30B29/06;C30B30/00 |
主分类号 |
C30B11/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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