| 摘要 |
FIELD: chemistry.SUBSTANCE: invention relates to inorganic chemistry and can be used to produce silane which is used to produce silicon in form of poly- and monocrystals, and films of amorphous hydrogenated silicon doped with fluorine. Silane is obtained by reducing silicon tetrafluoride with calcium hydride in the presence of hydrogen, wherein calcium hydride is synthesised in a horizontal flow reactor having grinding bodies by hydrogenating calcium metal at temperature not below 350°C; the reactor is then cooled to temperature of 180-200°C, rotated at 90-150 rpm and calcium hydride is obtained by reducing silicon tetrafluoride, after which the obtained silane is purified from hydrocarbons, e.g. by fractionation. The degree of conversion of calcium hydride is 45%. Content of hydrocarbon impurities in the silane fractionation product is less than 9·10mol %.EFFECT: invention enables to obtain silane with output of up to 95%.5 cl, 2 ex |
