METHOD OF DETERMINING SPATIAL POSITION OF OBJECT AND APPARATUS FOR IMPLEMENTING SAID METHOD

摘要

FIELD: physics.SUBSTANCE: when implementing the method, control marks are mounted at control points of the object, radiation from which forms exposure distribution in the image plane of the photodetector device. Coordinates of control marks in an instrument coordinate system are determined from the obtained image in one spectral range. The position of the instrument coordinate system relative an external system is determined. The spatial position of the object is determined from coordinates of control marks recalculated from the instrument coordinate system to the external coordinate system. Further, exposure distribution in a spectral range different from the first is determined. Coordinates of centres of exposure distribution in each of the two spectral ranges are compared. The refraction error value is determined and then subtracted from the obtained coordinates of control marks in the instrument coordinate system. In the apparatus, at least one point radiator of one control mark is in form of a white light radiator. The photodetector device has at least one photodetector in form of a matrix optical radiation detector, on each spatial element of which there is a light filter of one of at least two different spectral ranges.EFFECT: high measurement accuracy.3 cl, 3 dwg