发明名称 |
Plasma processing chamber component having adaptive thermal conductor |
摘要 |
An assembly comprises a component of a plasma process chamber, a thermal source and a polymer composite therebetween exhibiting a phase transition between a high-thermal conductivity phase and a low-thermal conductivity phase. The temperature-induced phase change polymer can be used to maintain the temperature of the component at a high or low temperature during multi-step plasma etching processes.
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申请公布号 |
US8529729(B2) |
申请公布日期 |
2013.09.10 |
申请号 |
US20100794907 |
申请日期 |
2010.06.07 |
申请人 |
STEVENSON TOM;DICKENS MICHAEL;LAM RESEARCH CORPORATION |
发明人 |
STEVENSON TOM;DICKENS MICHAEL |
分类号 |
C23F1/00 |
主分类号 |
C23F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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