发明名称 Thinned semiconductor components having lasered features and method of fabrication
摘要 A semiconductor component includes a thinned semiconductor substrate having a back side and a circuit side containing integrated circuits and associated circuitry. The semiconductor component also includes at least one lasered feature on the back side configured to provide selected electrical or physical characteristics for the substrate. The lasered feature can cover the entire back side or only selected areas of the back side, and can be configured to change electrical properties, mechanical properties or gettering properties of the substrate.
申请公布号 US8530895(B2) 申请公布日期 2013.09.10
申请号 US201213473644 申请日期 2012.05.17
申请人 WOOD ALAN G.;CORBETT TIM;MICRON TECHNOLOGY, INC. 发明人 WOOD ALAN G.;CORBETT TIM
分类号 H01L29/04 主分类号 H01L29/04
代理机构 代理人
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