| 摘要 |
A solenoid valve assembly capable of providing a continuous flow of pressurized inert gas to operate a process tool without interruption. The valve assembly comprises a manifold that is internally fluidly connected to each of the internal pressure ports, the internal actuator port, and the internal relief port of each solenoid valve, and wherein the manifold comprises a dedicated external relief port for each of the solenoid valves, wherein the dedicated external relief port is in fluid communication with the internal relief port of the respective solenoid valve such that, when one of the solenoid valves is de-energized, a supply of a pressurized inert gas can be connected to the external relief port the supply pressure to a respective pneumatic valve operated by that solenoid valve.
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