A METHOD FOR FORMING A POROUS ORGANOSILICATE FILM

摘要

PURPOSE: A method for forming a porous organic silicate membrane is provided to improve the dielectric constant of a membrane, mechanical strength, refractivity, or a combination thereof by removing a carbon-containing compound of a part or a whole part of the porous organic silicate membrane. CONSTITUTION: A method for forming a porous organic silicate membrane includes a composite organic silicate membrane; and a step of providing an organic silicate membrane and removing a carbon-containing compound of a part or a whole part of the composite organic silicate membrane and has a first refractive index and a first refractive coefficient. The organic silicate has a second refractive index and a second extinction coefficient. The second refractive index and the second extinction coefficient are less than the first refractive index and the first extinction coefficient.