发明名称 |
Conveyor assembly and method for conveying a substrate carrier |
摘要 |
A conveyor assembly suitable for use in a substrate processing system includes: at least one substrate carrier having a substrate-carrying surface configured to support at least one substrate; a processing track; a return track; a drive system configured to drive the substrate carrier along the processing track and the return track; and at least one swivel unit configured to pivot the substrate carrier around a substantially horizontal axis from a first orientation into a second orientation, and/or vice versa. Also provided is a method for conveying a substrate carrier including: providing a substrate carrier; positioning the substrate carrier in a first orientation; conveying the substrate carrier along a first track; and rotating the substrate carrier around a substantially horizontal axis into a second orientation.
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申请公布号 |
US8528722(B2) |
申请公布日期 |
2013.09.10 |
申请号 |
US200913059890 |
申请日期 |
2009.08.21 |
申请人 |
CLERKX EDUARD RENIER FRANCISCA;DULLEMEIJER ERNST;DINGS FRANCISCUS CORNELIUS;OTB SOLAR B.V. |
发明人 |
CLERKX EDUARD RENIER FRANCISCA;DULLEMEIJER ERNST;DINGS FRANCISCUS CORNELIUS |
分类号 |
B65G47/64 |
主分类号 |
B65G47/64 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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