| 摘要 |
PURPOSE: An optical engine for a digital exposure device is provided to expand the widths of exposure areas and to shorten times required for exposure by combining a prism with digital micro mirror elements and separating optical paths. CONSTITUTION: An optical engine(100) for a digital exposure device includes a prism part(110), a first digital micro mirror part(120), a second digital micro mirror part(130), and a projection lens part(140). The prism part reflects and transmits parallel rays(101) on a coating side(112). The ratio of the reflected rays and the transmitted rays is 50:50. The first digital micro mirror part adjusts the angle of first incident ray(102) reflected from the coating side of the prism part and vertically reflects the first incident ray to an exposure substrate(160). The second digital micro mirror part adjusts a second incident ray(103) transmitted through the coating side of the prism part with a pre-determined angle and re-reflects the second incident ray to the prism part to be vertically reflected to the exposure substrate. The projection lens part finely adjust distances between the reflected rays from the first digital micro mirror part and the prism part or receives the reflected rays in an overlapped state. The reflected rays are transmitted to the exposure substrate. |
