MAGNETIC SENSOR AND MAGNETISM DETECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a magnetic sensor capable of detecting a magnetic field in X, Y and Z axis directions on the same substrate.SOLUTION: There is provided a magnetic sensor having a comb-like shape in which magnetic convergence plates 52 and 62 on one side and magnetic convergence plates 53 and 63 on the other side are provided so as to face each other and a plurality of protruding members are formed at equal intervals on one side. Magnetoregistive elements 51 and 61 are arranged in a zigzag shape along the protruding members on one or the other side of the magnetic convergence plates. The magnetic sensor has a first arrangement pattern and a third arrangement pattern in which one of the magnetic convergence plates and the other of the magnetic convergence plates are arranged inside one of U-shaped parts adjacent to the magnetoregistive elements arranged in a zigzag shape and one of the magnetic convergence plates and the other of the magnetic convergence plates are arranged outside the other of U-shaped parts adjacent to the magnetoregistive elements arranged in a zigzag shape.