| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem in which, since conventional distributed Bragg reflectors having an air layer use a method in which the sacrificial layer is removed after a sacrificial layer and a high refractive index layer are grown, there are so many processes including crystal growth, patterning, dry etching, and wet etching.SOLUTION: In the distributed Bragg reflector formed by alternately laminating a material layer having refractive index higher than that of air and an air layer, the material layer having refractive index higher than that of air is composed of an upper end face roughly parallel to a substrate and a side face that continues from the upper end face. The distributed Bragg reflector is manufactured by a heat treatment in a growth process. |
