| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic probe allowing improvement of conversion efficiency and an S/N ratio of reception signals in a plurality of organic piezoelectric elements even while having excellent acoustic transmissivity to ultrasonic beams transmitted from a plurality of inorganic piezoelectric elements, allowing accurate agreement between arrangement positions of the plurality of inorganic piezoelectric elements and the arrangement positions of the plurality of organic piezoelectric elements, and maintaining properties of the organic piezoelectric elements high even after device completion.SOLUTION: By sequentially layering a backing material 1, an inorganic piezoelectric element layer 91a, an acoustic matching layer 94, an organic layer 95, and an electroconductive layer 96, and performing dicing at any pitch in the layered direction from the electroconductive layer 96 to the inorganic piezoelectric element layer 91a, respective fragments of a plurality of inorganic piezoelectric elements 2, first acoustic matching layers 3, lower organic layers 42, and signal electrode layers 44 are formed by aligning and sequentially overlapping them. An upper organic layer 41 and a ground electrode layer 43 are overlapped and joined on the signal electrode layers 44, and a plurality of organic piezoelectric elements 5 including the signal electrode layers 44, the upper organic layer 41, and the ground electrode layer 43 are formed. |
