METHOD FOR CLEANING INDUCTION HEATING COIL OF APPARATUS FOR PRODUCING SINGLE CRYSTAL BY FZ METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method for cleaning an induction heating coil, which can prevent an increase in the dislocation-developing probability in single crystal production by efficiently removing substances deposited on the inner surface and lowering the cooling efficiency of the induction heating coil.SOLUTION: There is provided a method for cleaning an induction heating coil 7 acting as a heat source for forming a melt zone 10 in an apparatus 14 for producing a single crystal by an FZ method in which the melt zone 10 is moved from the lower part to the upper part of a raw material crystal rod 1 to grow a single crystal rod 2 below the melt zone 10, which method for cleaning the induction heating coil 7 of the apparatus 14 for producing the single crystal by the FZ method comprises cleaning only the cooling water passage of the induction heating coil 7 by allowing a cleaning solution to flow into the cooling water passage through which the cooling water inside the induction heating coil 7 is passed.