| 摘要 |
PURPOSE: A method of manufacturing a piezoelectric thin film without lead is provided to make crystal grow well within a thin film by forming a piezoelectric thin film through a sol-gel method. CONSTITUTION: A method of manufacturing a piezoelectric thin film deposits a sol solution including a composition having the chemical formula of Bi0.5Na0.5Ti1-xMnxO3 on a substrate by spin coating and includes a process of forming a BNTMn-x thin film. A starting material of the sol solution uses bismuth nitrate pentahydrate(Bi(NO3)32O), sodium acetate(CH3COONa), titanium butoxide(Ti(O(CH2)3CH3)4), and manganese acetic(CH3COOMn). A solvent uses 2-methoxyethanol, acetic acid, and acetyl acetone. A deposition process through the spin coating includes a thermal process for thermal processing and crystallization for evaporating the solvent within the sol solution. |
