发明名称 PHOTOSENSITIVE NEGATIVE RESIN COMPOSITION, FINE STRUCTURE, METHOD FOR PRODUCING FINE STRUCTURE AND LIQUID EJECTION HEAD
摘要 PROBLEM TO BE SOLVED: To provide a photosensitive negative resin composition capable of producing a fine structure (for example, a nozzle) excellent in pigment ink resistance with high sensitivity and high resolution when a photolithographic process is applied, a fine structure using the resin composition, a method for producing the fine structure and a liquid ejection head.SOLUTION: There are provided a photosensitive negative resin composition which contains: a resin (a) having at least three cyclohexene oxide skeletons in its molecule, an onium salt (b) composed of a cationic part structure represented by the formula b1 defined in the description and an anionic part structure represented by the formula b2 defined in the description, a silane compound (c) and an organic solvent (d), a fine structure using the resin composition, a method for producing the fine structure and a liquid ejection head.
申请公布号 JP2013178492(A) 申请公布日期 2013.09.09
申请号 JP20130000578 申请日期 2013.01.07
申请人 CANON INC 发明人 TAKAHASHI AKIRA;NAGAOKA KYOSUKE;SHIMOMURA MASAKO
分类号 G03F7/004;C08G59/32;C08G59/68;G03F7/038;G03F7/075;H01L21/027 主分类号 G03F7/004
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