| 摘要 |
PROBLEM TO BE SOLVED: To provide a glow discharge analysis method, a glow discharge emission analysis method and a glow discharge emission analyzer capable of quantitating elements in a sample within an extremely short time.SOLUTION: Mixed gas G3 of inactive gas and reactive gas for increasing a spattering rate of glow discharge is used as discharge gas, a sample 5 is spattered by glow discharge and quantitative analysis of elements contained in the sample is performed based on a spattering time and a spattering depth. |
