| 摘要 |
PROBLEM TO BE SOLVED: To provide an improved technique for measuring a sample with X-ray diffraction.SOLUTION: A method of X-ray diffraction emits a beam 4 of X-rays along an illuminated strip 16 on a surface of a sample. The X-rays are diffracted by the sample and pass through a mask 20 having a slit extending substantially perpendicularly to the strip 16. The X-rays are detected by a two-dimensional X-ray detector 22 to detect the diffracted X-rays at different positions along the strip 16. |
