| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device which is advantageous at a point of accuracy in intensity measurement of charged particle beams.SOLUTION: A charged particle beam device which processes objects with charged particle beams includes: a detector which has a detection surface to detect the charged particle beams made incident on a partial area of the detection surface; and a control part which mutually differentiates target incident positions of the charged particle beams to be sequentially made incident on the detection surface. |
