发明名称 |
CROSS-LINKING AND MULTI-PHASE ETCH PASTES FOR HIGH RESOLUTION FEATURE PATTERNING |
摘要 |
<p>The present invention relates to a novel etching media in the form of printable, homogeneous etching pastes with non-Newtonian flow properties for the improved etching of inorganic oxides and silicon surfaces and which allow to prepare smaller features.</p> |
申请公布号 |
KR20130100092(A) |
申请公布日期 |
2013.09.09 |
申请号 |
KR20137000876 |
申请日期 |
2011.05.17 |
申请人 |
MERCK PATENT GMBH;NANO TERRA INC. |
发明人 |
GILLIES JENNIFER;KUEGLER RALF;STERN ERIC;MAYERS BRIAN;REUST PATRICK;HUNTING LINDSAY |
分类号 |
C09K13/04;C09K13/00 |
主分类号 |
C09K13/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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