发明名称 NEW LITHOGRAPHIC METHOD.
摘要 <p>A method for removing a high definition nanostructure in a partly free-standing layer, the layer, a sensor comprising said layer, a use of said sensor, and a method of detecting a species, and optional further characteristics thereof, using said sensor. The sensor and method are suited for detecting single ions, molecules, low concentrations thereof, and identifying sequences of base pairs, e.g., in a DNA-strand.</p>
申请公布号 NL2008412(C) 申请公布日期 2013.09.09
申请号 NL20122008412 申请日期 2012.03.05
申请人 TECHNISCHE UNIVERSITEIT DELFT 发明人 XU QIANG;SCHNEIDER GRéGORY;ZANDBERGEN HENNY;WU MENGYUE;SONG BO
分类号 G01N33/487;G03F7/00;G03F7/20;H01L29/16 主分类号 G01N33/487
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